Quick Q&A
Based on planar capacitance, it measures PECVD wafer coating tool parallelism without contact, provides real-time data at high speed, achieves ±0.020mm accuracy, and 0.008mm minimum resolution.
> 8 hours
Non-contact, high accuracy, stable, wide range, fast response
A modular, freely configurable 6-DOF maglev robotic transport system—more flexible, smart and precise than traditional structures. It supports lights-out manufacturing, reducing cost and loss.
<10µm precision, 2m/s speed, 2g max accel